Price on request
View price| Manufacturer | Suss |
|---|---|
| Model | PM-5 |
| Year | |
| Location | USA
|
| Category | Semiconductors - Metrology equipment |
| Product id | P240314065 |
| Language |
Suss PM-5 Prober
Suss PM-5 Prober
Suss PM-5 Prober
Suss PM-5 Prober
Suss PM-5 Prober
Suss PM-5 Prober
Suss PM-5 Prober
Suss PM-5 Prober
Suss PM-5 sonda
Suss PM-5 Prober
Suss PM-5 Prober
"Suss PM-5 Prober
Suss PM-5 Prober
Suss PM-5 Prober
Suss PM-5 Prober
Suss PM-5 Prober
Suss PM-5 Prober
Suss PM-5 Prober
Suss PM-5 Prober
Suss PM-5 Prober
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| Software | |
| ------------------- | |
| worked hours | |
| hours under power | |
| state | good |
| At local norms | --------- |
| status | visible |
| Last availability date | 10/03/2026 |
The Suss PM-5 is a precision metrology system designed for wafer and substrate handling with a maximum size capacity of up to 6 inches (150 mm diameter). It features an X, Y, and Theta stage configuration providing high accuracy and flexibility in positioning. The stage offers a movement range of 155 x 155 mm with a resolution of 5 µm and planarity under 10 µm over 6 inches, ensuring precise alignment. The Y axis includes a load stroke of 90 mm, while the Z height adjustment range is 10 mm with a contact/separation stroke of 3 mm. The standard Theta travel allows for full 360° rotation, with an optional fine Theta travel of ±10° for enhanced angular precision.
The chuck system maintains a planarity of 3 µm and vertical rigidity of less than 15 µm per 10 N force on a 6-inch wafer, providing stable and accurate support during measurement or processing. The ProbeHead platen supports fixation via vacuum, magnetic, or HF methods, with a travel range of 40 mm and a contact/separation stroke of 0.2 mm, offering repeatability within 1 µm.
Utility requirements include vacuum at -0.8 bar and compressed air at 4 bar to operate the fixation and movement systems effectively. The overall dimensions of the equipment are 490 mm in width, 490 mm in depth, and 480 mm in height, with a weight of approximately 60 kg.
Visually, the system includes a rotary stage with a circular platform and adjustable knobs for fine-tuning. The main body is housed in an orange and black casing that integrates both optical and mechanical components. Dual eyepieces and multiple objective lenses are present for detailed inspection and measurement tasks. Metal handles and adjustment knobs are located on the base platform to facilitate manual adjustments. Additionally, a white control box with multiple connectors and cables is part of the setup, indicating external control and connectivity options.
This configuration makes the Suss PM-5 suitable for semiconductor metrology applications requiring precise positioning and measurement of wafers and substrates up to 6 inches in diameter.
The following description has been generated using artificial intelligence based on the product information available. It is provided for guidance only and may not reflect all specifications or conditions. Please contact us if you need precise or confirmed details.
Wafer/Substrate size: up to 6”/150 diameter
X,Y, Theta Stage
Planarity over 6”: <10 µm
Resolution: 5 µm
Range of movement: 155 x 155 mm
Load stroke Y axis: 90 mm
Z height adjustment range: 10 mm
Z contact/separation stroke: 3 mm
Theta travel (standard): 360°
Theta travel, fine (optional): ±10°
Chuck
Planarity: 3 µm
Vertical rigidity 6”: <15 µm/10 N
ProbeHead Platen
Fixation Type: Vacuum, magnetic, HF
Travel range: 40 mm
Contact/separation stroke: 0.2 mm
Repeatability: 1 µm
Utilities
Vacuum: -0.8 bar
Compressed air: 4 bar
Dimensions & Weight
Width x Depth x Height: 490 x 490 x480mm
Weight: 60 kg
Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase
| Client type | Machinery dealer |
| Active since | 2019 |
| Offers online | 59 |
| Last activity | April 23, 2026 |
Wafer/Substrate size: up to 6”/150 diameter
X,Y, Theta Stage
Planarity over 6”: <10 µm
Resolution: 5 µm
Range of movement: 155 x 155 mm
Load stroke Y axis: 90 mm
Z height adjustment range: 10 mm
Z contact/separation stroke: 3 mm
Theta travel (standard): 360°
Theta travel, fine (optional): ±10°
Chuck
Planarity: 3 µm
Vertical rigidity 6”: <15 µm/10 N
ProbeHead Platen
Fixation Type: Vacuum, magnetic, HF
Travel range: 40 mm
Contact/separation stroke: 0.2 mm
Repeatability: 1 µm
Utilities
Vacuum: -0.8 bar
Compressed air: 4 bar
Dimensions & Weight
Width x Depth x Height: 490 x 490 x480mm
Weight: 60 kg
Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase
| Software | |
| ------------------- | |
| worked hours | |
| hours under power | |
| state | good |
| At local norms | --------- |
| status | visible |
| Last availability date | 10/03/2026 |
The Suss PM-5 is a precision metrology system designed for wafer and substrate handling with a maximum size capacity of up to 6 inches (150 mm diameter). It features an X, Y, and Theta stage configuration providing high accuracy and flexibility in positioning. The stage offers a movement range of 155 x 155 mm with a resolution of 5 µm and planarity under 10 µm over 6 inches, ensuring precise alignment. The Y axis includes a load stroke of 90 mm, while the Z height adjustment range is 10 mm with a contact/separation stroke of 3 mm. The standard Theta travel allows for full 360° rotation, with an optional fine Theta travel of ±10° for enhanced angular precision.
The chuck system maintains a planarity of 3 µm and vertical rigidity of less than 15 µm per 10 N force on a 6-inch wafer, providing stable and accurate support during measurement or processing. The ProbeHead platen supports fixation via vacuum, magnetic, or HF methods, with a travel range of 40 mm and a contact/separation stroke of 0.2 mm, offering repeatability within 1 µm.
Utility requirements include vacuum at -0.8 bar and compressed air at 4 bar to operate the fixation and movement systems effectively. The overall dimensions of the equipment are 490 mm in width, 490 mm in depth, and 480 mm in height, with a weight of approximately 60 kg.
Visually, the system includes a rotary stage with a circular platform and adjustable knobs for fine-tuning. The main body is housed in an orange and black casing that integrates both optical and mechanical components. Dual eyepieces and multiple objective lenses are present for detailed inspection and measurement tasks. Metal handles and adjustment knobs are located on the base platform to facilitate manual adjustments. Additionally, a white control box with multiple connectors and cables is part of the setup, indicating external control and connectivity options.
This configuration makes the Suss PM-5 suitable for semiconductor metrology applications requiring precise positioning and measurement of wafers and substrates up to 6 inches in diameter.
The following description has been generated using artificial intelligence based on the product information available. It is provided for guidance only and may not reflect all specifications or conditions. Please contact us if you need precise or confirmed details.
| Client type | Machinery dealer |
| Active since | 2019 |
| Offers online | 59 |
| Last activity | April 23, 2026 |
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