Price on request
View price| Wafer size | 11.81102 in |
| ------------------- | |
| worked hours | |
| hours under power | |
| state | good |
| At local norms | --------- |
| status | |
| Last availability date | 05/02/2026 |
The Zeiss/HSEB Axiospect 300 is a wafer inspection and review station designed for both bare and patterned wafers, supporting wafer sizes up to 30.0 cm (300 mm). It is equipped with two FOUP (Front Opening Unified Pod) loaders, allowing efficient handling of wafers in controlled environments. Additionally, it can inspect 200 mm wafers using open cassettes with appropriate adaptors.
This system features an Axiotron 300 microscope with multiple objectives, including Epiplan Neofluar 2.5 HD, Epiplan Neofluar 10, 20, and 50 HD DIC, as well as an Epiplan Apochromat 100 HD DIC objective. Illumination options include Differential Interference Contrast (DIC), brightfield, and darkfield, enhanced by a xenon light source connected via fiber cable.
The wafer chuck accommodates 300 mm wafers and is mounted on a 300 mm x 300 mm XY stage for precise positioning during inspection. The system utilizes Windows NT operating system running SmartVIEW version 4.13 software, which supports visual inspection, defect classification, wafer mapping, file management, and image handling and processing.
The equipment is constructed from stainless steel and includes dual chambers labeled 1 and 2 for wafer loading. It features two control panels equipped with joysticks and keyboards, with one keyboard protected by a plastic cover. A CRT monitor is mounted centrally above the equipment for display purposes. Safety and operational controls include a blue safety handle and a red emergency stop button located on the top surface near the handle.
Additional components include a SONY-labeled camera or sensor unit mounted on the top right side, ventilation grilles on the lower side panels for cooling, and power and control switches on the lower right panel. The wafer loading chambers have wafer holders and positioning pins visible inside. The black circular wafer stage includes three adjustment knobs and a connected blue cable.
The machine's surfaces, including the stage platform and microscope lenses, appear clean and well-maintained with no visible damage or wear, indicating careful upkeep. White cables and connectors are attached to the rear components, which also show no visible damage.
This comprehensive setup is suitable for detailed semiconductor wafer inspection tasks, combining precise mechanical components with advanced optical and software capabilities.
The following description has been generated using artificial intelligence based on the product information available. It is provided for guidance only and may not reflect all specifications or conditions. Please contact us if you need precise or confirmed details.
Wafer inspection/review station for bare and patterned wafers
Inspect 300mm wafers in FOUP loaders or 200mm wafers in open cassetes with adaptors
2 FOUP loaders
Axiotron 300 microscope
Equipe robot with PRE-5120 prealigner
300mm wafer chuck with 300mm x 300mm xy stage
DIC, brightfield, darkfield
objectives: Epiplan Neofluar 2.5 HD, Epiplan Neofluar 10,20,50 HD DIC, Epiplan Apochromat 100 HD DIC
xenon light source with fiber cable
Windows NT operating system with SmartVIEW ver.4.13 software for visual inspection and defect classification,
wafer mapping, file management, image handling and processing.
Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase
| Client type | Machinery dealer |
| Active since | 2019 |
| Offers online | 59 |
| Last activity | April 23, 2026 |
Wafer inspection/review station for bare and patterned wafers
Inspect 300mm wafers in FOUP loaders or 200mm wafers in open cassetes with adaptors
2 FOUP loaders
Axiotron 300 microscope
Equipe robot with PRE-5120 prealigner
300mm wafer chuck with 300mm x 300mm xy stage
DIC, brightfield, darkfield
objectives: Epiplan Neofluar 2.5 HD, Epiplan Neofluar 10,20,50 HD DIC, Epiplan Apochromat 100 HD DIC
xenon light source with fiber cable
Windows NT operating system with SmartVIEW ver.4.13 software for visual inspection and defect classification,
wafer mapping, file management, image handling and processing.
Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase
| Wafer size | 11.81102 in |
| ------------------- | |
| worked hours | |
| hours under power | |
| state | good |
| At local norms | --------- |
| status | |
| Last availability date | 05/02/2026 |
The Zeiss/HSEB Axiospect 300 is a wafer inspection and review station designed for both bare and patterned wafers, supporting wafer sizes up to 30.0 cm (300 mm). It is equipped with two FOUP (Front Opening Unified Pod) loaders, allowing efficient handling of wafers in controlled environments. Additionally, it can inspect 200 mm wafers using open cassettes with appropriate adaptors.
This system features an Axiotron 300 microscope with multiple objectives, including Epiplan Neofluar 2.5 HD, Epiplan Neofluar 10, 20, and 50 HD DIC, as well as an Epiplan Apochromat 100 HD DIC objective. Illumination options include Differential Interference Contrast (DIC), brightfield, and darkfield, enhanced by a xenon light source connected via fiber cable.
The wafer chuck accommodates 300 mm wafers and is mounted on a 300 mm x 300 mm XY stage for precise positioning during inspection. The system utilizes Windows NT operating system running SmartVIEW version 4.13 software, which supports visual inspection, defect classification, wafer mapping, file management, and image handling and processing.
The equipment is constructed from stainless steel and includes dual chambers labeled 1 and 2 for wafer loading. It features two control panels equipped with joysticks and keyboards, with one keyboard protected by a plastic cover. A CRT monitor is mounted centrally above the equipment for display purposes. Safety and operational controls include a blue safety handle and a red emergency stop button located on the top surface near the handle.
Additional components include a SONY-labeled camera or sensor unit mounted on the top right side, ventilation grilles on the lower side panels for cooling, and power and control switches on the lower right panel. The wafer loading chambers have wafer holders and positioning pins visible inside. The black circular wafer stage includes three adjustment knobs and a connected blue cable.
The machine's surfaces, including the stage platform and microscope lenses, appear clean and well-maintained with no visible damage or wear, indicating careful upkeep. White cables and connectors are attached to the rear components, which also show no visible damage.
This comprehensive setup is suitable for detailed semiconductor wafer inspection tasks, combining precise mechanical components with advanced optical and software capabilities.
The following description has been generated using artificial intelligence based on the product information available. It is provided for guidance only and may not reflect all specifications or conditions. Please contact us if you need precise or confirmed details.
| Client type | Machinery dealer |
| Active since | 2019 |
| Offers online | 59 |
| Last activity | April 23, 2026 |
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