375,000 $
Make an offer| Wafer size | 12 in |
| ------------------- | |
| Length x width x height | 192.0 × 80.0 × 80.0 |
| Weight | 12500 lb |
| worked hours | |
| hours under power | |
| state | as-is, where-is |
| At local norms | yes |
| status | visible but unplugged |
| Datasheet | Ulvac Technologies Inc. SIV-500 |
| Last availability date | 08/12/2025 |
The ULVAC SIV-500 is a sputtering system designed for thin film deposition, including Indium Tin Oxide (ITO), on various substrates such as wafers and glass. Manufactured by Ulvac Technologies Inc. in 2016, this system supports wafer sizes up to 30.48 cm (300 mm) and features an in-line vertical deposition design intended to minimize particle generation. It can accommodate substrates up to approximately 1000 mm by 1000 mm, with pallets sized for 500 mm x 500 mm wafers, and supports smaller wafer diameters including 100 mm, 150 mm, 200 mm, and 300 mm. The system is suitable for applications in display and touch panel manufacturing, offering computer-controlled precision and optional substrate heating.
The equipment measures 4876.8 mm in length, 2032.0 mm in width, and 2032.0 mm in height, with a weight of approximately 5671.5 kg. The machine includes a large metallic vacuum chamber equipped with multiple circular ports and a transparent panel, as well as an emergency stop (EMO) button mounted on the chamber for safety. Connected to the chamber base are numerous pipes, wires, and fittings, along with a large metallic pump assembly featuring multiple labels and warning stickers.
Additional visible components include a rotary vacuum pump embossed with the ULVAC logo, a blue cylindrical vacuum pump component attached to the pump assembly, and an Elo touchscreen monitor mounted nearby for system control. The system also features a yellow panel labeled "ULVAC SIV-500," which includes several screws and rectangular black handles or vents. Electrical specifications are detailed on a metal plate, indicating operation at 208 VAC ±5%, 3-phase power, 60 Hz frequency, with a full load current of 145.5 A and a machine overcurrent protection device rated at 200 A.
The system is accompanied by a metal rack with a keyboard and monitor positioned in front of the machine, facilitating user interaction. Various cables, tubing, and sensors are connected throughout the pump and chamber assemblies. Certification stickers from Abstraction Engineering and the Santa Clara Fire Department are also present on the equipment.
This ULVAC SIV-500 sputtering system was recently removed from a cleanroom environment in California, USA. It includes target backing plates, helium cryo compressors (x2), Edwards dry pumps (x2), shielding, and umbilicals. The overall condition appears well-maintained, though no specific operational status or testing information is provided.
The following description has been generated using artificial intelligence based on the product information available. It is provided for guidance only and may not reflect all specifications or conditions. Please contact us if you need precise or confirmed details.
The ULVAC SIV-500 is a sputtering system used for depositing thin films, including Indium Tin Oxide (ITO), onto various substrates like wafers, glass, and other materials. It is known for its versatility, featuring an in-line vertical deposition design for low particle generation and the ability to handle substrates up to 1000mm x 1000mm. This was was used for 500mm x 500mm pallets (Supports several smaller wafers such as 100mm, 150mm, 200mm, & all the way up to 300mm). The system is suitable for applications such as displays and touch panels, with features like easy maintenance, optional substrate heating, and computer-controlled precision. Just recently removed from a cleanroom in California USA, the system is in excellent condition and comes with target backing plates, helium cryo compressors (x2), Edwards dry pumps (x2), Shielding, and umbilicals. More images available upon request.
Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase
| Client type | Machinery dealer |
| Active since | 2009 |
| Offers online | 4 |
| Last activity | April 7, 2026 |
The ULVAC SIV-500 is a sputtering system used for depositing thin films, including Indium Tin Oxide (ITO), onto various substrates like wafers, glass, and other materials. It is known for its versatility, featuring an in-line vertical deposition design for low particle generation and the ability to handle substrates up to 1000mm x 1000mm. This was was used for 500mm x 500mm pallets (Supports several smaller wafers such as 100mm, 150mm, 200mm, & all the way up to 300mm). The system is suitable for applications such as displays and touch panels, with features like easy maintenance, optional substrate heating, and computer-controlled precision. Just recently removed from a cleanroom in California USA, the system is in excellent condition and comes with target backing plates, helium cryo compressors (x2), Edwards dry pumps (x2), Shielding, and umbilicals. More images available upon request.
Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase
| Wafer size | 12 in |
| ------------------- | |
| Length x width x height | 192.0 × 80.0 × 80.0 |
| Weight | 12500 lb |
| worked hours | |
| hours under power | |
| state | as-is, where-is |
| At local norms | yes |
| status | visible but unplugged |
| Datasheet | Ulvac Technologies Inc. SIV-500 |
| Last availability date | 08/12/2025 |
The ULVAC SIV-500 is a sputtering system designed for thin film deposition, including Indium Tin Oxide (ITO), on various substrates such as wafers and glass. Manufactured by Ulvac Technologies Inc. in 2016, this system supports wafer sizes up to 30.48 cm (300 mm) and features an in-line vertical deposition design intended to minimize particle generation. It can accommodate substrates up to approximately 1000 mm by 1000 mm, with pallets sized for 500 mm x 500 mm wafers, and supports smaller wafer diameters including 100 mm, 150 mm, 200 mm, and 300 mm. The system is suitable for applications in display and touch panel manufacturing, offering computer-controlled precision and optional substrate heating.
The equipment measures 4876.8 mm in length, 2032.0 mm in width, and 2032.0 mm in height, with a weight of approximately 5671.5 kg. The machine includes a large metallic vacuum chamber equipped with multiple circular ports and a transparent panel, as well as an emergency stop (EMO) button mounted on the chamber for safety. Connected to the chamber base are numerous pipes, wires, and fittings, along with a large metallic pump assembly featuring multiple labels and warning stickers.
Additional visible components include a rotary vacuum pump embossed with the ULVAC logo, a blue cylindrical vacuum pump component attached to the pump assembly, and an Elo touchscreen monitor mounted nearby for system control. The system also features a yellow panel labeled "ULVAC SIV-500," which includes several screws and rectangular black handles or vents. Electrical specifications are detailed on a metal plate, indicating operation at 208 VAC ±5%, 3-phase power, 60 Hz frequency, with a full load current of 145.5 A and a machine overcurrent protection device rated at 200 A.
The system is accompanied by a metal rack with a keyboard and monitor positioned in front of the machine, facilitating user interaction. Various cables, tubing, and sensors are connected throughout the pump and chamber assemblies. Certification stickers from Abstraction Engineering and the Santa Clara Fire Department are also present on the equipment.
This ULVAC SIV-500 sputtering system was recently removed from a cleanroom environment in California, USA. It includes target backing plates, helium cryo compressors (x2), Edwards dry pumps (x2), shielding, and umbilicals. The overall condition appears well-maintained, though no specific operational status or testing information is provided.
The following description has been generated using artificial intelligence based on the product information available. It is provided for guidance only and may not reflect all specifications or conditions. Please contact us if you need precise or confirmed details.
| Client type | Machinery dealer |
| Active since | 2009 |
| Offers online | 4 |
| Last activity | April 7, 2026 |
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Waferovací stroj Ulvac Technologies Inc. SIV-500
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Ulvac Technologies Inc. SIV-500 Wafelmachine
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