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| Software | |
| ------------------- | |
| worked hours | 10 hours |
| hours under power | 10 hours |
| state | like new |
| At local norms | yes |
| status | under power |
| Last availability date | 06/05/2026 |
FOR SALE – KLA Filmetrics Profilm3D Optical Profilometer
This KLA Corporation / Filmetrics Profilm3D Optical Profilometer, manufactured in 2023, is a high-performance, non-contact 3D surface profilometer utilizing white light interferometry (WLI). It is designed for precision surface metrology applications in both research and production environments, offering advanced capabilities for detailed surface analysis.
Key Features:
- Non-contact 3D surface topography measurement based on white light interferometry (WLI).
- Vertical resolution down to 0.05 µm with WLI and as fine as 0.001 µm (1 nm) when using the optional Phase-Shifting Interferometry (PSI) mode.
- Measurement range spans from 50 nm to 10 mm.
- Fully motorized XYZ stage with 100x100 mm travel and 500 µm piezo Z travel, complemented by ±5° manual tilt adjustment.
- Multiple measurement modes including WLI, PSI, Enhanced Roughness Mode, and TotalFocus® True Color imaging.
- Capable of measuring roughness, waviness, step height, surface shape/bow, radius of curvature, and volume.
- Software features include autofocus, FFT filtering, digital zoom up to 4x, and automated multi-site measurements.
- Suitable for semiconductor processes such as etching, sputtering, deposition, and spin coating.
Included Accessories and Observations:
The device comes equipped with Nikon microscope objective lenses (10X/0.30 and 50X/0.55), a stage platform with adjustment knobs, and multiple cables including power and USB connections. Calibration standards such as a Cr-on-Si step height standard and a software license are also included.
Condition:
The profilometer appears clean and in good physical condition with no visible damage, indicating careful use.
Ideal for semiconductor fabs, electronics manufacturers, research laboratories, universities, and companies involved in precision optics and medical device manufacturing, this Profilm3D Optical Profilometer offers comprehensive surface metrology capabilities with high accuracy and versatility.
The following description has been generated using artificial intelligence based on the product information available. It is provided for guidance only and may not reflect all specifications or conditions. Please contact us if you need precise or confirmed details.
🔬 FOR SALE – KLA Filmetrics Profilm3D Optical Profilometer
KLA Filmetrics Profilm3D, a high-performance non-contact 3D optical surface profilometer based on white light interferometry (WLI) — one of the most capable and affordable systems available for precision surface metrology in R&D and production environments.
📋 ABOUT THE MACHINE
Manufacturer: KLA Corporation / Filmetrics (San Diego, USA)
Model: Profilm3D Optical Profilometer
Condition: Very good – lightly used
✅ KEY FEATURES
• Non-contact 3D surface topography measurement using white light interferometry (WLI)
• Vertical resolution down to 0.05µm (WLI) and 0.001µm (1nm) with optional PSI mode
• Working range: 50nm to 10mm
• Fully motorized XYZ stage: 100x100mm travel, 500µm piezo Z travel, ±5° manual tilt
• Multiple measurement modes: WLI, Phase-Shifting Interferometry (PSI), Enhanced Roughness Mode, TotalFocus® True Color imaging
• Measures: roughness, waviness, step height, surface shape/bow, radius of curvature, volume
• Software: autofocus, FFT filtering, digital zoom (4x), automated multi-site measurements
• Suitable for semiconductor processes: etch, sputter, deposition, spin coating, and more
🎯 IDEAL FOR
Semiconductor fabs, electronics manufacturers, research labs, universities, and precision optics/medical device companies requiring high-accuracy, non-destructive surface measurement.
📦 WHAT'S INCLUDED
Objectives, calibration standards (Cr-on-Si step height standard), software license, and all available accessories.
Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase
| Client type | Factory – small or medium company |
| Active since | 2026 |
| Offers online | 8 |
| Last activity | May 6, 2026 |
🔬 FOR SALE – KLA Filmetrics Profilm3D Optical Profilometer
KLA Filmetrics Profilm3D, a high-performance non-contact 3D optical surface profilometer based on white light interferometry (WLI) — one of the most capable and affordable systems available for precision surface metrology in R&D and production environments.
📋 ABOUT THE MACHINE
Manufacturer: KLA Corporation / Filmetrics (San Diego, USA)
Model: Profilm3D Optical Profilometer
Condition: Very good – lightly used
✅ KEY FEATURES
• Non-contact 3D surface topography measurement using white light interferometry (WLI)
• Vertical resolution down to 0.05µm (WLI) and 0.001µm (1nm) with optional PSI mode
• Working range: 50nm to 10mm
• Fully motorized XYZ stage: 100x100mm travel, 500µm piezo Z travel, ±5° manual tilt
• Multiple measurement modes: WLI, Phase-Shifting Interferometry (PSI), Enhanced Roughness Mode, TotalFocus® True Color imaging
• Measures: roughness, waviness, step height, surface shape/bow, radius of curvature, volume
• Software: autofocus, FFT filtering, digital zoom (4x), automated multi-site measurements
• Suitable for semiconductor processes: etch, sputter, deposition, spin coating, and more
🎯 IDEAL FOR
Semiconductor fabs, electronics manufacturers, research labs, universities, and precision optics/medical device companies requiring high-accuracy, non-destructive surface measurement.
📦 WHAT'S INCLUDED
Objectives, calibration standards (Cr-on-Si step height standard), software license, and all available accessories.
Please note that this description may have been translated automatically. Contact us for further information. The information of this classified ad are only indicative. We recommend to check the details with the seller before a purchase
| Software | |
| ------------------- | |
| worked hours | 10 hours |
| hours under power | 10 hours |
| state | like new |
| At local norms | yes |
| status | under power |
| Last availability date | 06/05/2026 |
FOR SALE – KLA Filmetrics Profilm3D Optical Profilometer
This KLA Corporation / Filmetrics Profilm3D Optical Profilometer, manufactured in 2023, is a high-performance, non-contact 3D surface profilometer utilizing white light interferometry (WLI). It is designed for precision surface metrology applications in both research and production environments, offering advanced capabilities for detailed surface analysis.
Key Features:
- Non-contact 3D surface topography measurement based on white light interferometry (WLI).
- Vertical resolution down to 0.05 µm with WLI and as fine as 0.001 µm (1 nm) when using the optional Phase-Shifting Interferometry (PSI) mode.
- Measurement range spans from 50 nm to 10 mm.
- Fully motorized XYZ stage with 100x100 mm travel and 500 µm piezo Z travel, complemented by ±5° manual tilt adjustment.
- Multiple measurement modes including WLI, PSI, Enhanced Roughness Mode, and TotalFocus® True Color imaging.
- Capable of measuring roughness, waviness, step height, surface shape/bow, radius of curvature, and volume.
- Software features include autofocus, FFT filtering, digital zoom up to 4x, and automated multi-site measurements.
- Suitable for semiconductor processes such as etching, sputtering, deposition, and spin coating.
Included Accessories and Observations:
The device comes equipped with Nikon microscope objective lenses (10X/0.30 and 50X/0.55), a stage platform with adjustment knobs, and multiple cables including power and USB connections. Calibration standards such as a Cr-on-Si step height standard and a software license are also included.
Condition:
The profilometer appears clean and in good physical condition with no visible damage, indicating careful use.
Ideal for semiconductor fabs, electronics manufacturers, research laboratories, universities, and companies involved in precision optics and medical device manufacturing, this Profilm3D Optical Profilometer offers comprehensive surface metrology capabilities with high accuracy and versatility.
The following description has been generated using artificial intelligence based on the product information available. It is provided for guidance only and may not reflect all specifications or conditions. Please contact us if you need precise or confirmed details.
| Client type | Factory – small or medium company |
| Active since | 2026 |
| Offers online | 8 |
| Last activity | May 6, 2026 |
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